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MEMS/Nanotechnology Business Growth in 
China by Partnership, JVs and Acquisition
sparksdr@hanking.com
Dr. Douglas Sparks
CTO & Executive Vice President
Hanking Electronics Ltd
October 2016
通过合作、合资、收购,MEMS/纳米技术企业在中国
的增长
Hanking Group’s Business Units
• Iron, Nickel & Gold Mining
• Cast Iron & Steel Processing
• Bearings
• Retail Outlets
• Investments
• Electronics‐ MEMS
• 7000 employees
罕王集团商业板块
Location of Hanking Group’s Business Units
Hanking is an expanding, private company,
headquartered in Shenyang, China
罕王集团全球布局
MEMS
Design
Fab
Hanking Electronics has just added 2 new MEMS & ASIC design offices in
Milan and Pisa Italy
Why is Hanking Interested in MEMS?
Yole
为什么罕王对MEMS感兴趣
General M&A Technology 2016 Quotes
China has overtaken the United States for the first time as the world’s biggest
“acquiring nation” for mergers and acquisitions in the technology industry,
accounting for a 45 per cent share of the market in the first four months of this
year,
It estimated that Chinese technology acquisitions reached a new high of US$65.7
billion through 456 transactions, up from the previous record of US$41.6 billion
through 434 deals in the same period last year.
“Historically, the US had consistently been the biggest buying nation per year-to-
date period and annually since 1995 [in technology mergers and acquisitions],”
the report said.
US mergers and acquisitions in the technology sector totaled US$45.6 billion in
the first four months of this year.
Dealogic‐ 2016
2016年技术企业并购总体价格
中国向硅谷注入了大量的资金
涉及中国投资者的技术
交易的估计数目
Defintions‐ JV, Partnerships
定义:合资与合作
Partnerships‐ Can be formal or informal, sale, 
market or technology driven
Joint Venture (JV) – A formal business 
relationship dividing ownership that can lead to 
an acquisition by one of the venture 
organizations
Recent M&A Activity in China
MEMS & Semiconductors
Acquirer Target Announcement MEMS/Sensors/Semi
Hanking Electronics Ltd
Maxim Integrated MEMS 
Business Unit October, 2016 MEMS
SMIC Lfoundry June, 2016 CMOS & MEMS Foundry
Chine Resource Holdings Fairchild (Rejected) December, 2015 Rejected Semi & MEMS
GAE Ltd Silex July, 2015 MEMS Foundry
Tsinghua Unigroup Micron July 2015‐ proposed Semi   
JIC Capital NPX Power Business Unit May, 2015 Semi
National Silicon Industry Group Okmetic April, 2015 MEMS, SOI Wafer Supplier
Hua Capital Omnivision April, 2015 CMOS Imaging Sensor
Hua Capital ISSI March, 2015 Semi
JCET & Huatian STATSChip Pac December, 2014 Semi Packaging
Also‐ in Japan‐ TDK acquired Tronics, and Murata VTI…
Nanotechnology‐ Chinese companies have spent $3.9 Billion on biotechnology acquisitions 
in just the first half of 2016
中国最近的MEMS和半导体行业企业并购活动
MEMS Partnership Examples
XinGang & Vespers – PiezoMEMS microphones 2016
Hanking Electronics – MEMSCAP – Hanking MUMPS 2012
MEMS 合作的例子
R. Grace, MEMS Commercialization: From the Lab…to the Fab…to the Market, Commercial Micro
Manufacturing, January/February 2012
Long Development Times for MEMS Products 
Acquisition can shorten this time
长的MEMS产品开发时间
收购可以缩短这个时间
Acquisition Shortens the Product 
Development Cycle
MEMS accelerometers took 24 years to go from the idea stage to production.  
Gyros took 26 years of MEMS development time.
Hanking acquisition shortens 24‐26 years  to 1 year of technology transfer
The Hanking (Maxim) products have high manufacturing yield, good reliability, 
products in automobiles, smart phones and drones already.  A starting 
customer base exists. 
These are advantages that Hanking will have over other Chinese MEMS gyro 
and 6 dof companies trying to develop these products on their own.
收购缩短产品开发周期
Partnership Example
Hanking MUMPS
合作例子
罕王MUMPs
Hanking MUMPS: Partnership in China
MUMPS (Multiple User MEMS Process ) is a low cost method
of getting new MEMS designs fabricated, which is needed in
China. SOI, AlN-Piezoelectric and low stress poly processes
and design rules are available.
The low price makes it ideal for Universities and start ups
罕王MUMPS在中国
Partnerships: Hanking’s Network of MEMS Fabs
R&D and Prototype devices run in production fabs/foundries
DRIE, Wafer Bond, Deposition, Lithography…
Hanking MUMPS wafer fabrication
4”‐8” wafers Single steps or entire processes
罕王MEMS美国研发条件
MEMS Acquisition Example
MEMS收购例子
Hanking Electronic’s MEMS Gyro and 
Accelerometer Products
Gyro            Accel
罕王微电子的MEMS陀螺仪和加速度计产品
Key MEMS Fabrication Processes‐
DRIE, HF Release, Wafer Bond
Thick Epi/Poly Layer‐ Developed & 
Licensed from the Fraunhofer Institute
DRIE‐ Deep Reactive Ion Etching to 
form the capacitive plates
Anhydrous HF release of the moving 
epi/poly structures
关键MEMS生产工艺‐ 深反应离子刻蚀、HF释放、晶圆键合
Acquisition Patents and Other IP
Acquisition IP
83 Patents
SensorDynamics
61 Patents
Maxim Integrated 
MEMS 90 Patents
收购专利和其他知识产权
Fraunhofer‐ A Strategic Partner for 
Hanking Electronics
Fraunhofer‐ 罕王微电子战略合作伙伴
Fraunhofer has been developing MEMS inertial sensor for 
over 20 years.
MEMS Foundry and R&D labs
Fraunhofer worked with SensorDynamics to launch this 
MEMS business
Hanking has licensed 83 Fraunhofer patents
Improvements to Hanking MUMPS
from the Acquisition
200mm Fab Tools
15 Years of
MEMS process 
Development
Maxim & Sensor 
Dynamics
Fraunhofer
Technology
Hanking MUMPS
通过收购提高罕王MUMPS
SensorDynamics was a European semiconductor company specialized in developing and 
manufacturing high‐volume micro‐ and wirelesssemiconductor sensor products for 
applications in automotive, industry and high‐end consumer sectors. The company was 
acquired by Maxim Integrated Products, Inc.; a semiconductor company based in San Jose, 
California. Acquisition was announced in Jul 2011 by Tunc Doluca, CEO and President of 
Maxim. SensorDynamics was acquired for $164 million ($130 million in cash plus $34 million 
in debt). SensorDynamics developed and produced custom‐made designs and standard 
components for use in vehicle stabilization, occupant protection, navigation systems, keyless 
go systems or autonomous energy generators for wireless and battery free controllers for 
industrial, automotive and high‐end consumer application.[5] With its headquarters 
in Graz, Austria, SensorDynamics had offices in Italy and Germany and a worldwide sales and 
distribution network. The company employed about 130 people in July 2011.  Founded in 
2002
9 years of product development as part of SensorDynamics
背景:SensorDynamics
Hanking will be Leveraging 20 years of 
Fraunhofer, Sensor Dynamics and Maxim 
MEMS Gyro‐Accel Technology
Fraunhofer MEMS gyro  14 years of R&D : Licensed Patents Filed 1995‐2009
Sensor Dynamics – 9 years of development– founded in 2002‐ start up company – sold 
for $136M to Maxim 2011
Maxim Integrated  2011‐2015‐ 4 years of product commercialization, manufacturing and 
customer development at Maxim
New Hanking Electronic’s team members come from Maxim, Sensor Dynamics, ST Micro, 
Freescale….
20 years of technology and product development 1995‐2015
罕王将利用Fraunhofer, sensor Dynamics 和Maxim的20
年开发经验的MEMS陀螺仪‐加速度计技术优势
New Fab Tools/Processes available for 
Hanking MUMPS Foundry
HF release, DRIE‐ STPS, LAM, Gemini bonders, CMP/grind wafer 
thinning, polySi, TEOS dep, Spray coaters, liftoff, steppers ….
罕王MUMPS代工的新设备/工艺
Piezo MUMPS‐ Piezoelectric Resonators
Aluminum Nitride (AlN)‐SOI‐ Partner
AlN
PIEZO MUMPs
5 Mask Levels
AlN Layer 0.5um
10 SOI um
2 Metal layers 
Si
Hanking MUMPS
压电MUMPS‐ 压电谐振器 氮化铝‐SOI
Hanking Electronics' New MEMS Fab
Located outside of Shenyang
Backend fab was completed in 2015,
Hanking’s customers will have access to a 
high volume 8” MEMS fab
罕王微电子新MEMS厂房
Hanking MEMS Cleanroom
Class 100 MEMS cleanroom – and equipment install 2015 
Pure MEMS fab, not a CMOS fab.  CMOS wafers can be 
made elsewhere and then bonded to the MEMS wafers
罕王微电子洁净间
Hong Kong
Guangzhou
Shenzhen
Taipei
Hsinchu
QingDao
Weihai
Shenyang
Harbin
Changchun
Beijing
Zhengzhou
Dalian
Taiyuan
Shijiazhuang
Tianjin
Lanzhou
Xian
Kunming
Chengdu
Chongqing
Wuhan
Shanghai
Changsha
Hangzhou
Nanjing
Hefei
Xiamen
Hong Kong
Guangzhou
Shenzhen
Taipei
Hsinchu
QingDao
Weihai
Shenyang
Harbin
Changchun
Beijing
Zhengzhou
Dalian
Taiyuan
Shijiazhuang
Tianjin
Lanzhou
Xian
Kunming
Chengdu
Chongqing
Wuhan
Shanghai
Changsha
Hangzhou
Nanjing
Hefei
Xiamen
Target Customers: Fabless MEMS Companies, 
Startups & Universities in China
There are more than 100 
institutions and 500 researchers 
and more than 50 fabless MEMS 
design start‐ups in China
目标客户:在中国的无晶圆厂MEMS公司、初创公司和大学
Hanking MUMPS – in China as a MEMS 
Development Partner
• Provides proof‐of‐concept prior to volume 
manufacturing – use MUMPS China
• Enables accessible and cost‐effective early‐stage 
development through standard processes
• Supports multiple process platforms for product 
flexibility as required
• Provides exploratory development and single 
step processes as needed
• Hanking’s 200mm fab for high volume production
29
罕王 MUMPS – 中国MEMS开发的合作者
Hanking’s Commitment to MEMS
Hanking is developing a 127 acre industrial park near Shenyang, China,
dedicated to MEMS-based sensor products. This will include a MEMS fab for 8”
wafers, packaging facility and system assembly buildings for consumer, industrial,
automotive and medical products.
In Liaoning province
罕王微电子对MEMS的承诺
Conclusion
MEMS and Nanotechnology business growth is being 
accelerated in China by acquisitions, JVs and partnerships
Hanking Electronics has employed both partnerships for its 
Hanking MUMPS foundry services and acquisition for MEMS 
inertial sensors
Hanking Electronics is announcing a new product line of 3dof 
and 6dof MEMS IMUs
总结

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Sparks Hanking Chinano 2016