Much of today's Semi industry are making devices using older legacy tools, producing their devices on 200mm wafers. These tools have been and in my opinion still are the workhorses of the Semi industry. The vacuum pumps, particularly Turbos, in many cases can be 10 to 15 years old. The technology is old, batteries to levitate pumps, EDM machined rotors, matched sets, mineral oil, etc. Many of these pumps have been discontinued by the pump OEM. Leybold has created 13 different upgrades and installed more than 100 MAG Turbos on legacy tools. Our kits are single part number and many have the communication cables (pump to tool interface) included. Our plug and play controllers are variable frequency so the speed can be adjusted to match you current process. We are proud of our upgrades and I think the value we add sets Leybold apart from the others. Price is what you pay, Values is what you get. Come see us and ask questions at Semicon West, Booth #2440

1. Oerlikon Leybold Vacuum USA Inc.
5700 Mellon Road
Export, PA 15632-8900
T 1 800-764-5369
F 1 800-215-7782
www.oerlikon.com/leyboldvacuum
VISIT US AT BOOTH #2440
info.vacuum.ex@oerlikon.com
Oerlikon Leybold Vacuum Turbomolecular Pump
Upgrades for Semiconductor Processing
Increasing demands, new pumping challenges, changing processes require upgrades
to Leybold Digital MAG Technology
n Full 5X Axis Magnetically Levitated
Rotor, Not a Hybrid and No Oil
n Plug and Play Electronics
n No Batteries
n No Calibration
n Improving Yields by Lower
Particle Issues
n MTBF >6 years
n Kepla-Coated Rotor
n 1X Part Number for the Complete
Upgrade Package
n More than 50X Chambers Upgraded
n PSG, USG and STI Qualified
n Full 5X Axis Magnetically
Levitated Rotor
n Plug and Play Electronics
n No Batteries
n No Calibration
n Improving Yields by Lower
Particle Issues
n Variable Speed Controller
n MTBF End-Users Report ~ 42 months
n Kepla Coated Rotor - Emissivity 1:1
n 90C insures process does not
condense in the lower stages of
the pump. The MAG W 1500CT is
the hottest pump available. Today
and is a proven winner.
Successful MAG Pump
Upgrades Include:
n AMAT Metal & Poly Etch
n AMAT Ultima HDP-CVD
n AMAT 5500 PVD
n LAM 9400 & 9600
n Novellus/LAM Speed C2
n Varian Implanters E220,
E250, E500, Viista
n Axcelis 8250, GSD and HE
n Eaton NV1080
LAM 9600 & AMAT
5200 Metal Upgrades
LAM/Novellus C2
Turbo Upgrades
Varian & Axcelis Implanter Turbo Upgrades
n Full 5X Axis Magnetically Levitated Rotor, Not a Hybrid and No Oil
n Plug and Play Electronics
n No Batteries
n No Calibration
n Variable Speed Controller
n ISO-F Flanges are used to insure a safe installation.
n Installation Support
AMAT 5500 Endura Pre-Clean and TxZ
Turbo Upgrades
New TurboVac 350i Hybrid
Best performance in its class:
n 100x Higher Compression
n Up to 60% Higher Light Gas Pumping Speed
n The Only Maintenance and Oil-Free Hybrid Bearing Pump in the Market
n On-Board Controller
n Plug and Play Kit Available
n Installation Support and Onsite Service Possible (Bearing Replacement)
n Fully Integrated Converter with 24 and 48 V DC Supply
n Only Pump with USB as a Standard Interface
n Replaces Existing Leybold TMP361C
Trust OEM Upgrades and Repairs
by the Industry Leader
Contact:
Tom Mooney
Market Segment Manager
T 512-656-5483
tom.mooney@oerlikon.com
Why Upgrade to Oerlikon Leybold
Vacuum Turbo Pumps?
n Experience: Leybold has been
upgrading semiconductor tools
for >13 years with over 100
successful upgrades
n Confidence: We use only Leybold
OEM Parts. All our upgrades insure
that pumps are brought up to
“As New Status” with a 1-Year
Factory Warranty
n Peace of Mind: Dealing with
direct with an OEM pump
manufacturer
n Consignment: With a commitment
to large upgrade projects, pumps
are on site when ready. No
searching the Internet for used
pumps or parts
n OEM repairs vs. others…
Ask us the difference
Save Money by Reducing
Spares Inventory
Oerlikon Leybold MAG Drive Digital
Controllers will run the entire family of
MAG Digital Turbos, to include Implant
Thin-Film, Poly and Metal Etch