Epitaxy Equipment for More than Moore 2021 - Sample

From Technologies to Markets
© 2021
Epitaxy Equipment for
More-Than-Moore
2021
Market and Technology
Report
Sample

2
2
• Glossary and definition 2
• Table of contents 5
• Report objectives 8
• Report scope 9
• Report methodology 13
• About the author 14
• Companies cited in this report 15
• What we got right, what we got wrong 16
• Who should be interested by this report 18
• Yole Group’s related reports 19
• Three-Page Summary 21
• Executive summary 25
• Introduction and context 63
o Overview of Semiconductor Manufacturing
o Moore vs More-than-Moore approaches
o Introduction to epitaxy
• Epitaxy market trends 86
o Epitaxy drivers and requirements
o Epitaxy market trends by application
o Epitaxy market trend by substrate material type
• Epitaxy equipment market trends 120
o Overview of deposition technologies
o Introduction to epitaxy equipment types
o Epitaxy equipment trends by application
o Epitaxy equipment trends by material type
• Epitaxy equipment market forecast (2020 – 2026) 155
o Overall epitaxy equipment market in units and revenues
• By application
• By substrate type
• By epitaxy equipment type
• By epilayer
• Epitaxy equipment vendors – competitive landscape 186
• Epitaxy equipment vendor ranking and market share
• By equipment type
• By semiconductor applications
• By substrate type
Epitaxy Equipment for More Than Moore Devices 2021 | Sample | www.yole.fr | ©2021
TABLE OF CONTENTS
Part 1/2

3
3
o Epitaxy industry news (by equipment type)
o Product portfolio
o Focus on China
• Chinese epitaxy equipment vendor positioning
• Brief look on epi-houses and supply chain 246
o By equipment type
o By application type
In-depth look on major applications for epitaxy equipment market
• Photonics 265
o Introduction to photonics devices
o Light Emitting Diodes (LEDs)
• Epitaxy driver, requirements, and challenges
• Focus on Epitaxy of MicroLEDs
o Laser Diodes (LDs)
• Epitaxy challenges
• Epitaxy equipment choice
o Epitaxy equipment forecast for photonics (in units & revenues)
• Split by equipment type
• Split by substrate type
• Power 320
o Introduction to Power devices
o Power GaN market
o Power SiC market
o Power Si market
o Epitaxy drivers, requirements and challenges
o Epitaxy equipment of choice
o Epitaxy equipment forecast for power (in units & revenues)
• Radio-Frequency (RF) 375
o Introduction to RF components
o RF device trends
o RF epitaxy related news
o Epitaxy challenges
o Epitaxy equipment forecast for RF (in units & revenues)
• Split by substrate type
• Conclusion and perspectives 394
• Appendix 402
• Corporate presentation 406
TABLE OF CONTENTS
Part 2/2

4
4
Biography and contact
ABOUT THE AUTHOR
Vishnu KUMARESAN, Market &Technology Analyst,Equipment and Materials for Semiconductor Manufacturing
Vishnu KUMARESAN, PhD., is a Technology & Market analyst in the Semiconductor Manufacturing Team of Yole Développement, France. He focuses
on the semiconductor manufacturing domain, covering both equipment and material segments. His scope includes mainstream microelectronic
applications as well as More-than-Moore applications. Having lived and worked in four countries, he has more than 11 years of international
experience in the electronics industry, covering semiconductor, display, and software technologies. Prior to joining Yole, he worked as an Epitaxy
engineer at Aledia, an advanced startup in the MicroLED display industry and has previously gained corporate experience at IMEC, CNRS, Saint-
Gobain and Infosys.
Vishnu obtained his PhD in Epitaxy, Material Physics & Chemistry from Sorbonne University, France, and his Masters in Microelectronics from National
University of Singapore and Technical University of Munich, Germany.
Email: vishnu.kumaresan@yole.fr

5
OBJECTIVE OF THIS REPORT
Epitaxy Equipment
has huge market
opportunities in
More-than-Moore
era
• With in the scope of More-than-Moore applications, Si along with non-classical substrates such as GaAs, GaN, SiC and InP are
growing at important CAGRs.
• Choice of these materials come with stringent requirements in terms of the material quality and device performance. This directly
translates to ultra-pure thin film and nanostructure growth using epitaxial systems like MOCVD, MBE and HTCVD.
• Choice of such equipment type and model not only depends on technical constraints, but also on the fab dynamics such as ROI,
Equipment uptime,THP, etc.,
• The objective of this report is to provide a global picture of the Epitaxy equipment technology and market opportunities available in
More-than-Moore era.
Present the current status of epitaxy equipment technologies (by equipment type, epi-material, and application)
Provide detailed information about different semiconductor applications addressed by epitaxy growth technology
Furnish an overview of the technological trends involving epitaxial layers
Provide market metrics for epitaxy equipment used in MtM semiconductor applications
A snapshot of the equipment vendors competitive landscape and explore supply-chain synergy by identifying key players in
epitaxy field

6
6
A UNIQUE AND PROVEN METHODOLOGY
› Market segmentation
› Per application
› Per technical needs
› Per technology
adoption and behavior
of the supply chain
MARKET › Top to bottom
› Industry organizations
› Aggregate of market forecasts at
system and device levels up to the
wafer and equipment
› Bottom-up
› Ecosystem analysis
› Aggregate of all players’ revenue at
device, module and system levels
› In unit, dollar and wafer
BOTTOM-UP
&TOP-TO-BOTTOM
› Technology analysis
› Competitive landscape
› Technology comparison
› Reverse costing
› Reverse engineering
› Technology life cycle
› Development cycles
› Adoption by the supply chain
› HV manufacturing and evolutions
TECHNOLOGY
Thanks to its marketing approach, its
understanding of the industrial and
technical environment and information
collection, Yole Développement can assist
companies at every stage of their growth.

7
About Yole Développement | www.yole.fr | ©2020
COMPANIES CITED IN THIS REPORT
Aixtron, Aledia, AMEC, Applied Materials, ASM International, CSD Epitaxy, DCA Instruments,
Epiluvac, Epistar, II-VI, Infineon, IntelliEPI, IQE, LPE S.p.A, MBE Komponenten, Naura, Nexperia, NuFlare,
Onsemi, Power Integrations, Riber, SOITEC, STMicroelectronics,Taiyo Nippon Sanso,Tokyo Electron
(TEL),TOPEC,TSMC,Veeco,VPEC,Wolfspeed, X-Fab and more.
Non-exhaustive list of companies

8
8
• Compound semiconductors are widely used for photonics in laser diodes and in displays, RF and power electronics devices.
SCOPE OFTHIS REPORT
Types of equipment and substrates covered
Epitaxy equipment types
CVD-based
APCVD HTCVD LPCVD MOCVD PECVD
HVPE LPE MBE
Equipment type Substrate type
GaAs
X active layer
InP
X active layer
SiC
SiC active layer
SiC
GaN active layer
Si
Si active layer
Si
GaN active layer
Sapphire
GaN active layer
GaN
GaN active layer

9
9
SCOPE OFTHIS REPORT
Application and equipment type segmentation used in this report
Applications
Photonics
LEDs
Lasers *
RF
Power
Si Power
SiC Power
GaN Power
MEMS
Equipment
MOCVD
MBE
HTCVD
Si HTCVD
SiC HTCVD
*Though Laser Diodes are emitting devices and Photodiodes are detecting/receiving devices, for simplicity purpose we have grouped Photodiodes under
laser diodes as equipment market size for PDs is relatively small.

10
10
• Key investors who are interested in understanding the market position of epitaxy equipment
players and their growth prospects.
• Epitaxy equipment providers and Epitaxy equipment parts providers who are looking for
information regarding the epitaxy equipment market sentiment and technology trends.
• Epi-houses, foundries and other companies involved in the epitaxy business who are looking to
identify equipment solutions available for their applications and material systems.
• Substrate manufacturers whose products would be immediately exposed to the epitaxy step by an
epi-house or foundry.
• Device suppliers looking for opportunities to diversify their product portfolio in a related epitaxy
business.
• R&D labs and start-up companies that have developed an innovative technology solution and wish
to understand epitaxy equipment models available in the market.
WHO SHOULD BE INTERESTED IN THIS REPORT?

11
11
• 2020-2026 epitaxy growth equipment market forecast (by application, substrate type, equipment type
and epi-material)
• 2020 epitaxy equipment market share Competitive landscape for equipment vendors by epitaxy
equipment type, epi-material type, and application type
• Focus on China: sales in China for major equipment vendors and a look at their counterparts from
China
• Overview of major players and supply chain using epitaxy equipment (by application, by substrate type
and by epi-material)
What’s new:
• Epitaxy equipment portfolio for major epitaxy equipment vendors
• Focus on China: sales in China for major equipment vendors and a look at their counterparts from
China
• Substrate diameter trend for each epitaxy equipment type (MOCVD, HTCVD and MBE)
• Competitive landscape based on equipment vendor positioning (by application and by epi-material type)
• Equipment forecast (2020 – 2026) breakdown by epi-material, substrate sizes and equipment type
KEY FEATURES

12
12
APPROACHESTO IMPROVE SEMICONDUCTOR DEVICES
Technology node (nm)
Moore’s
Law
-
Miniaturization
14nm
7nm
22nm
32nm
45nm
65nm
90nm
130nm
RF devices Power devices
MEMS & Sensors LED Photonics
More-than-Moore:Technology and substrate diversification
In More-than-Moore approach (MtM approach), the PPAC factor is improved
not only by scaling but by using non-Si materials and by heterogeneously
integrating them with one another.
In this report, we focus only on MtM market
In such a race for Price-
Performance-Area-Cost
(PPAC) improvement, the
mainstream micro-
electronic application mainly
use scaling as the approach
to improve PPAC factor
following Moore’s law
Logic Memory
Functionality
180nm
28 nm

13
13
SUBSTRATES USED IN MORE THAN MOORE SPACE
Applications Substrates or supports that are useful in More-than-Moore space
MEMS
and
Sensors
CIS
POWER
RF
PHOTONICS
Sapphire
Si SOI
LED
Laser
Si SOI
Si
Si SOI
SiC
GaAs
GaAs
Glass
SiGe Ceramic
SiC Sapphire
SiC Si
InP
GaN
In high volume production In volume production Under development/feasibility study
Ga2O3
SiC
GaAs InP
GaN
InP AlN
GaN Sapphire SiC
Si

14
14
SUBSTRATES THAT NEED EPITAXIAL LAYER
By epitaxial material and corresponding applications
Applications
Si SiC GaAs Sapphire GaN InP Ga2O3 AlN GaSb
MEMS
Power
RF
Photonics
LED
Laser
VCSEL*
EEL
Main application for this material In production Under development/feasibility study
Si
Si active layer
Si
GaN active layer
SiC
SiC active layer
SiC
GaN active layer
GaAs
X active layer
Sapphire
GaN active layer
GaN
GaN active layer
InP
X active layer
GaSb
GaSb active layer
AlN
X active layer
Ga2O3
X active layer
GaAs
GaSb active layer
* GaSb and InP layers mentioned under VCSEL are mainly used for Photodiode applications

15
EPITAXY EQUIPMENT MARKET
By epi-material : 2020 - 2026
By 2026, GaN is
forecasted to
remain the epi-
material type with
highest revenue.
However SiC is
expected to grow
the fastest with a
CAGR of 10%, due
to the strong
demand in
Automotive and
Industrial market
segments.
InP
47 M$
Si
94 M$
SiC
133 M$
GaAs
157 M$
GaN
259 M$
Others
7 M$
InP
75 M$
Si
154 M$
SiC
239 M$
GaAs
214 M$
GaN
402 M$
2020
692M$
2026
1.1B$

16
EPITAXY EQUIPMENT MARKET
Applications driving equipment demand : 2020 - 2026
Between 2020 and
2026, there are
various applications
that contribute to
the growth of
Epitaxy equipment
demand. Notable
ones among them
would be Power
and Opto-
electronics.
692
800
852 875
905
965
1091
2020 2021 2022 2023 2024 2025 2026
© Yole Développement 2021
MicroLED
VCSELs
GaN Power
SiC Power
GaN Power
MicroLED
Si Power
GaN Power
SiC Power
VCSELs
GaN Power
SiC Power
MicroLED
GaN Power
Epitaxy equipment market Forecast (in millions of U.S.Dollars)

17
TOTAL EPITAXY EQUIPMENT MARKET SIZE
2020 – 2026 Market size evolution by epitaxy equipment type
6.2 B$
cumulative sales
expected from
2020 until 2026
for all epitaxy
equipment type
in More-than-
Moore space.
2020:
419 M$
2026:
630 M$
1.50 X
CAGR: 7.0 %
2020-2026 cumulative market size of 3.5 B$
MOCVD
2020:
45
M$
2026:
68 M$
1.51 X
CAGR: 7.1 %
392 M$
2020:
228 M$
2026:
393 M$
1.72 X
CAGR: 9.5 %
2.3 B$
HTCVD MBE
SiC epi reactors are included under HTCVD

18
18
EPITAXY EQUIPMENTVENDORS Non-exhaustive list

19
39%
12%
11%
8%
5%
3%
3%
3%
3%
3%
2%
8%
Aixtron
Veeco
AMEC
TEL
AMAT
NuFlare
Riber
Taiyo Nippon
Naura
LPE
ASM International
Others
2020 Market Share (%) for Epitaxy Equipment Vendors
2020 EPITAXY EQUIPMENT MARKET SHARE
Market share for epitaxy equipment vendors
Revenue ranking of
Epitaxy equipment
players have not
changed much,
thoughVeeco seem
to have lost
considerable
market share.
Aixtron remains to
be the market
leader, followed by
Veeco and AMEC.
10%
-15%
-2%
2%
1%
-1%
0%
2%
2%
-3%
1%
3%
2018-2020 change in Market share (%)
NOTE: In case of HTCVD, the revenues are estimated only for applications and material systems that are in the scope of this report. HTCVD Epitaxy equipment revenues for total MtM space would be much higher.
© Yole Développement 2021

20
20
2020 EPITAXY EQUIPMENT REVENUES
Split by equipment type and equipment vendor
$230,1 $61,0 $78,0
$3,6 $21,7 $28,9
$43,3 $53,5 $20,6 $10,2 $4,4
$33,9 $19,9 $10,2 $11,9 $17,7
$20,7 $22,3 $4,3
MOCVD
HTCVD SiC
HTCVD Si
MBE
2020 Epitaxy equipment revenues (in million of US dollars) split by equipment type

21
21
EPITAXY EQUIPMENT FORECAST SNAPSHOT (2020 - 2026)
By equipment type

22
22
EPITAXY EQUIPMENT FORECAST (2020 - 2026)
By Equipment type, epi-material, substrate size, application and market segment

23
23
2020 MARKET SHARE AND COMPETITIVE LANDSCAPE
By epitaxy vendor, equipment type, epi-material and application

24
24
FOCUS ON CHINA
General equipment spending and epitaxy vendors positioning

25
Contact our
SalesTeam
for more
information
25
Contact our
SalesTeam
for more
information
Lithography and Bonding
equipment for More than Moore
2021
Power SiC: Materials, Devices
and Applications 2020
GaN Power 2021: Epitaxy, Devices,
Applications andTechnologyTrends
MicroLED Displays – Market,
Industry and Technology Trends 2021
YOLE GROUP OF COMPANIES RELATED REPORTS
Yole Développement

26
Contact our
SalesTeam
for more
information
26
Contact our
SalesTeam
for more
information
Automotive Low-Voltage Si
MOSFET Comparison 2021
Hamamatsu Photodiode and
Laser in Livox’s Horizon LiDAR
SiCTransistor Comparison
2020
AppleWatch 4’s PPG and
ECG Health Sensors
YOLE GROUP OF COMPANIES RELATED REPORTS
System Plus Consulting

27
27
27
Yole Group of Companies, including Yole Développement,
System Plus Consulting and PISEO, are pleased to provide
you a glimpse of our accumulated knowledge.
We invite you to share our data with your own network,
within your presentations, press releases, dedicated
articles and more, but you first need approval from Yole
Public Relations department.
If you are interested, feel free to contact us right now!
We will also be more than happy to give you updated data
and appropriate formats.
Your contact: Sandrine Leroy, Dir. Public Relations
Email: leroy@yole.fr
HOWTO USE OUR DATA?

28
CONTACTS
Western US & Canada
Hal Levy - hal.levy@yole.fr
+ 1 408 334-0554
Eastern US & Canada
ChrisYouman - chris.youman@yole.fr
+1 919 607 9839
Europe and RoW
Lizzie Levenez - lizzie.levenez@yole.f
+49 151 23 54 41 82
DACH (North Germany,Austria, Switzerland)
Neha CHAUDHURY - neha.chaudhury@yole.fr
+49 172 97 47 248
Benelux, UK & Scandinavia
Marine Wybranietz - marine.wybranietz@yole.fr
+49 69 96 21 76 78
South Germany & France
Martine Komono - martine.komono@yole.fr
+49 173 69 43 31
India and RoA
Takashi Onozawa - takashi.onozawa@yole.fr
+81 80 4371 4887
Greater China
MavisWang - mavis.wang@yole.fr
+886 979 336 809 +86 136 6156 6824
Korea
Peter Ok - peter.ok@yole.fr
+82 10 4089 0233
Japan
Miho Ohtake - miho.ohtake@yole.fr
+81 34 4059 204
Toru Hosaka – toru.hosaka@yole.fr
+81 90 1775 3866
Japan and Singapore
Itsuyo Oshiba - itsuyo.oshiba@yole.fr
+81 80 3577 3042
FINANCIAL SERVICES
› Jean-Christophe Eloy - eloy@yole.fr
+33 4 72 83 01 80
› Ivan Donaldson - ivan.donaldson@yole.fr
+1 208 850 3914
CUSTOM PROJECT SERVICES
› Jérome Azémar, Yole Développement -
jerome.azemar@yole.fr - +33 6 27 68 69 33
› Julie Coulon, System Plus Consulting -
jcoulon@systemplus.fr - +33 2 72 17 89 85
GENERAL
› Sandrine Leroy, Public Relations
sandrine.leroy@yole.fr - +33 4 72 83 01 89
› General inquiries: info@yole.fr - +33 4 72 83 01 80
REPORTS, MONITORS &TRACKS
Follow us on

Epitaxy Equipment for More than Moore 2021 - Sample

Recommandé

Recommandé

Contenu connexe

Plus de Yole Developpement

Plus de Yole Developpement (20)

Dernier

Dernier (20)

Epitaxy Equipment for More than Moore 2021 - Sample