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MEMS TECHNOLOGY BY S.APPA RAO
[object Object],[object Object],INTRODUCTION
[object Object],MEMS PROCESS PowerPoint
FABRICATION PROCESS:
[object Object],[object Object],[object Object],[object Object],DEPOSITION:
[object Object],[object Object],[object Object],[object Object],LITHIOGRAPHY:
ETCHING: ,[object Object],[object Object]
[object Object],[object Object],[object Object],[object Object],[object Object],[object Object],MATERIALS FOR MEMS:
[object Object],MICRO MACHINING TECHNOLOGY:
[object Object],[object Object],[object Object],TYPES OF MICROMACHINING:
MEMS ACCELEROMETRER: ,[object Object],[object Object],[object Object],[object Object],[object Object]
PIEZO-RESISTIVE ACCELEROMETER:
LAYOUT OF THE RESISTOR:
MASKS that are used 4 ACCELEROMETER:
FABRICATION PROCESS:
Contd….
INTERFACE ELECTRONIC CKT
MEMS ACCELEROMETER
[object Object],[object Object],[object Object],[object Object],[object Object],ADVANTAGES:
[object Object],[object Object],[object Object],TECHNICAL LIMITATIONS:
[object Object],[object Object],[object Object],APPLICATIONS:
[object Object],[object Object],FUTURE:
[object Object]
[object Object]

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mems ppt