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Micro Electromechanical System (MEMS)
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mems ppt

  1. 1. MEMS TECHNOLOGY BY S.APPA RAO
  2. 2. <ul><li>MEMS: micro-electro-mechanical systems </li></ul><ul><li>Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology. </li></ul>INTRODUCTION
  3. 3. <ul><li>Same as the process steps used for making conventional electronic circuits </li></ul>MEMS PROCESS PowerPoint
  4. 4. FABRICATION PROCESS:
  5. 5. <ul><li>CHEMICAL DEPOSITION </li></ul><ul><li>Chemical vapour deposition </li></ul><ul><li>PHYSICAL DEPOSITION </li></ul><ul><li>Sputtering </li></ul>DEPOSITION:
  6. 6. <ul><li>  </li></ul><ul><li>Application of photo resist </li></ul><ul><li>Optical exposure to print an image of the mask onto the resist </li></ul><ul><li>Immersion in an aqueous developer solution to dissolve the exposed resist </li></ul>LITHIOGRAPHY:
  7. 7. ETCHING: <ul><li>DRY ETCHING </li></ul><ul><li>WET ETCHING </li></ul>
  8. 8. <ul><li>Materials are the basic things required to develop micro sensors </li></ul><ul><li>Metals </li></ul><ul><li>Polymers </li></ul><ul><li>Ceramic materials </li></ul><ul><li>Semiconductors </li></ul><ul><li>Composite materials </li></ul>MATERIALS FOR MEMS:
  9. 9. <ul><li>Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices </li></ul>MICRO MACHINING TECHNOLOGY:
  10. 10. <ul><li>BULK micromachining: </li></ul><ul><li>SURFACE micromachining: </li></ul><ul><li>LIGA process: </li></ul>TYPES OF MICROMACHINING:
  11. 11. MEMS ACCELEROMETRER: <ul><li>CONVENTIONAL ACCELEROMETER SENSOR </li></ul><ul><li>Made of bulky and heavy metal parts </li></ul><ul><li>Require high operating voltage/current </li></ul><ul><li>Needs careful maintenance </li></ul><ul><li>Highly expensive not throwaway type </li></ul>
  12. 12. PIEZO-RESISTIVE ACCELEROMETER:
  13. 13. LAYOUT OF THE RESISTOR:
  14. 14. MASKS that are used 4 ACCELEROMETER:
  15. 15. FABRICATION PROCESS:
  16. 16. Contd….
  17. 17. INTERFACE ELECTRONIC CKT
  18. 18. MEMS ACCELEROMETER
  19. 19. <ul><li>Significantly lower manufacturing costs </li></ul><ul><li>Small inertial mass </li></ul><ul><li>Particularly realized in the area of: </li></ul><ul><li>– sensors </li></ul><ul><li>– signal switching </li></ul>ADVANTAGES:
  20. 20. <ul><li>Imprecise fabrication methods </li></ul><ul><li>Expensive and complex packaging </li></ul><ul><li>CAD Design tool inaccuracies </li></ul>TECHNICAL LIMITATIONS:
  21. 21. <ul><li>Accelerometers in consumer electronics devices such as game controllers </li></ul><ul><li>Communications </li></ul><ul><li>biotechnology </li></ul>APPLICATIONS:
  22. 22. <ul><li>As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives. </li></ul><ul><li>It has the potential to change our daily life as much as computer </li></ul>FUTURE:
  23. 23. <ul><li>THANK YOU!!! </li></ul>
  24. 24. <ul><li>QUIRIES????? </li></ul>
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